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发明名称
Method of etching a surface of a substrate comprising LiTaO{HD 3 {B and chemically similar materials
摘要
申请公布号
USRE29336(E)
申请公布日期
1977.08.02
申请号
US19760751926
申请日期
1976.12.17
申请人
发明人
分类号
C04B41/53;C04B41/91
主分类号
C04B41/53
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代理人
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