| 摘要 |
1,072,742. Coating with metals by cathode sputtering. ELEKTROPHYSIKALISCHE ANSTALT BERNHARD BERGHAUS. Dec. 10, 1963 [Dec. 18, 1962], No. 48785/63. Heading C7F. In the cathode sputtering of e.g. chromium in an iron substrate, the substrate is connected alternately as the cathode, and the period between alternations is greater than the time of deionization of the gas forming the discharge and less than the travel time of the atoms between the cathode and the substrate. The substrate may be cleaned by a glow discharge in hydrogen. |
