| 摘要 |
PURPOSE:To improve the efficiency and the precision of voltage measurement by providing the analysis processing stage which not only sets a slice level but also logically discriminates whether binarization is possible or not based on analysis results of the voltage resolution and the distribution state of voltage measured values. CONSTITUTION:With respect to voltage data having an unfixed absolute value which is obtained by measurement with an electronic beam prober, a laser prober, or the like, measurement and additive averaging of the voltage waveform are repeated until a certain voltage resolution is obtained. The distri bution of voltage measured values is made into a histogram, and a slice level is set to this histogram, and voltage measured values in the high level part and the low level part are binarized. The analysis processing stage is provided which analyzes the voltage resolution and the distribution state of voltage measured values to not only set the slice level but also logically discriminate whether binarization is possible or not based on analysis results. Thus, the base of binarization is statistically secured to improve the efficiency and the precision of measurement. |
