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发明名称
INSPECTION TOOL
摘要
申请公布号
US4037971(A)
申请公布日期
1977.07.26
申请号
US19760670320
申请日期
1976.03.25
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
BELLESON, JAMES GARMAN;CLARK, KENDALL
分类号
G01N21/956;G01R31/265;G01R31/308;G01R31/309;(IPC1-7):G02B27/17
主分类号
G01N21/956
代理机构
代理人
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地址
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