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经营范围
发明名称
PLASMA ETCHING METHOD
摘要
申请公布号
JPS5287985(A)
申请公布日期
1977.07.22
申请号
JP19760004738
申请日期
1976.01.19
申请人
MITSUBISHI ELECTRIC CORP
发明人
ABE HARUHIKO;NISHIOKA KIYUUSAKU
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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