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经营范围
发明名称
FILM THICKNESS CONTROLLING IN THIN FILM FORMATION
摘要
PURPOSE:To control film thickness in transferring an article to be treated above an evaporation source and forming a thin film on it, by detecting thickness of the thin film with a light projector-receiver.
申请公布号
JPS5285082(A)
申请公布日期
1977.07.15
申请号
JP19760001140
申请日期
1976.01.08
申请人
ULVAC CORP
发明人
TOKU AKIHIKO
分类号
C23C14/54
主分类号
C23C14/54
代理机构
代理人
主权项
地址
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