发明名称 Superconducting molybdenum or molybdenum alloy film prodn. - by coating substrate with molybdenum sulphide and treating with metal and halogen vapour
摘要 <p>Prodn. of superconducting Mo (alloy) films on substrates coated with Mo involves first coating the substrate with sulphides, e.g. MoS2, Mo1-xMxS2 or treating at over 600 degrees C with a gas mixt. of S and/or Se, their halides and diluents e.g. Ar, N2 and/or H2, and then treating at 1000-1200 degrees C with a gas mixt. of perhalides and/or halogens and Mo, Pb, Sn, lanthanides, A-metals and/or their alloys. The process is suitable for the continuous prodn. of films on wires, rods, ribbons and sheets. Pref. coating takes place continuously and the gas used contains 85-99 vol.% diluent and is at a total press. of 0.5-2 atmos. Coating with MoS2 or Mo1-xMxS2 (in which M is Nb, Ta, Ti, Zr, Hf, V, Cr, W. May be carried out by sputtering, evapn. or deposition from a reactive gas phase.</p>
申请公布号 DE2600847(A1) 申请公布日期 1977.07.14
申请号 DE19762600847 申请日期 1976.01.12
申请人 NICKL,JULIUS J.,DIPL.-CHEM.DR. 发明人 J.,DIPL.-CHEM.DR. NICKL,JULIUS
分类号 H01L39/12;H01L39/24;(IPC1-7):23F17/00;23C11/00;01B12/00;23C13/00 主分类号 H01L39/12
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