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经营范围
发明名称
PRODUCTION OF SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPS5284984(A)
申请公布日期
1977.07.14
申请号
JP19760000792
申请日期
1976.01.07
申请人
HITACHI LTD
发明人
SATOU TADANOBU
分类号
H01L21/8222;H01L21/331;H01L27/082;H01L29/08;H01L29/73
主分类号
H01L21/8222
代理机构
代理人
主权项
地址
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