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发明名称
PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5279772(A)
申请公布日期
1977.07.05
申请号
JP19750156629
申请日期
1975.12.26
申请人
MITSUBISHI ELECTRIC CORP
发明人
KOBAYASHI SHIGEKI
分类号
H01L21/288;H01L21/28
主分类号
H01L21/288
代理机构
代理人
主权项
地址
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