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发明名称
ELECTRON BEAM EXPOSURE DEVICE
摘要
申请公布号
JPS5279662(A)
申请公布日期
1977.07.04
申请号
JP19750154767
申请日期
1975.12.26
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
WASHIMI MASAHIKO
分类号
H01L21/027;G03F7/20;H01L21/302
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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