发明名称 PRODUCTION OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To obtain a process for production of semiconductor devices such as diodes having superior electrical characteristics and high volume productivity whereby a porous layer is formed only in a high concentration diffused region and the depth of said porous layer is accurately controlled by the diffusion depth of the high concentration diffused region.
申请公布号 JPS5278376(A) 申请公布日期 1977.07.01
申请号 JP19750155277 申请日期 1975.12.25
申请人 NIPPON ELECTRIC CO 发明人 SHIYOUJI SATORU
分类号 H01L21/22;H01L21/316;H01L21/329;H01L29/861 主分类号 H01L21/22
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