| 摘要 |
PURPOSE:To prevent the peeling of a crystal film from a substrate by incorporating lanthanum at a specific ratio into the crystal film at the time of forming an orientable crystal film consisting of barium sodium niobate on the substrate consisting of a single crystal, polycrystal, amorphous material, etc. CONSTITUTION:La2O3 is further added to the compsn. consisting of 7.2mot% Na2CO3, 42.2mol% BaCO3 and 50.6mol% Nb2O5 as a target so as to attain 0.01 to 20.0 atomic% in terms of La at the time of forming an orientable crystal film consisting of the barium sodium niobate by a sputtering method, etc., on the surface of a substrate consisting of the single crystal, polycrystal or amorphous material. The C-axial orientation of the barium sodium niobate crystal on the substrate perpendicularly to the substrate and the peeling of the orientable crystal film of the barium sodium niobate from the substrate are prevented by using this target. |
