发明名称 DIE BONDING EQUIPMENT
摘要 PURPOSE:To avoid contamination on a chip caused by bonding material by arranging a planer between a coating means for bonding material and a mount ing means for a chip, so as to keep a specified gap for the upper surface of a heat sink to be conveyed. CONSTITUTION:After a heat sink 3 inserted in a tunnel furnace 1 is heated at a specified temperature while being carried along the bottom wall of the tunnel furnace 1, it is stopped at the lower position of an aperture part 6. A specified amount of fused solder 5 is dripped and spread on the upper surface of the heat sink by a dispenser 7. When the hear sink 3 passes under the planer 10, the spread fused solder 5 is flattened in a specified uniform thickness. After that, the heat sink 3 is stopped at the lower position of an aperture part 12, and a chip 13 sucked and retained by a collet 14 is mounted on the heat sink 3. Thereby the chip is mounted in the manner in which wettability for the junction surface of the chip is large and air gap is hard to generate, and solder contamination on the chip and influence of bonding material upon the collet can be eliminated even when scribing is performed.
申请公布号 JPH0350746(A) 申请公布日期 1991.03.05
申请号 JP19890185551 申请日期 1989.07.18
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 MAKINO YUTAKA;HIRANO MASATO;KITAYAMA YOSHIFUMI;YAMAMOTO AKIHIRO
分类号 H01L21/52 主分类号 H01L21/52
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