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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5276876(A)
申请公布日期
1977.06.28
申请号
JP19750153565
申请日期
1975.12.22
申请人
TOUYOU DENGU SEISAKUSHIYO KK
发明人
YAMAMOTO SHINKICHI
分类号
H01L21/52;H01L21/58
主分类号
H01L21/52
代理机构
代理人
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