发明名称 RING LIGHT ILLUMINATOR AND BEAM SHAPER FOR RING LIGHT ILLUMINATOR
摘要 PROBLEM TO BE SOLVED: To provide a ring light illuminator capable of creating a well-defined and homogeneous illumination field in an area to be illuminated.SOLUTION: A ring light illuminator with annularly arranged light sources is disclosed. To each light source there corresponds a beam shaper 50 comprising a light collector 60, homogenizing means 70 for homogenizing light from the light source, and imaging means 80 for imaging an output of the homogenizing means 70 into an area to be illuminated. The homogenizing means 70 in various embodiments is a rod 70, into which light from the light collector 60 is directed. The end of the rod 70 opposite to the light collector 60 is imaged by the imaging means 80 into the area to be illuminated.SELECTED DRAWING: Figure 6
申请公布号 JP2016105190(A) 申请公布日期 2016.06.09
申请号 JP20160005081 申请日期 2016.01.14
申请人 KLA-ENCOR CORP 发明人 ANDY HILL
分类号 G02B19/00;F21S2/00;G02B21/06;G02B21/10 主分类号 G02B19/00
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