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发明名称
摘要
申请公布号
JPS5222510(B2)
申请公布日期
1977.06.17
申请号
JP19720126801
申请日期
1972.12.19
申请人
发明人
分类号
H01L21/223;H01L29/861
主分类号
H01L21/223
代理机构
代理人
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地址
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