SELECTIVE OXIDATION OF SEMICONDUCTOR SILICON,申请号JP19750148488-传众专利搜索

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发明名称	SELECTIVE OXIDATION OF SEMICONDUCTOR SILICON
摘要
申请公布号	JPS5272576(A)	申请公布日期	1977.06.17
申请号	JP19750148488	申请日期	1975.12.15
申请人	TOKYO SHIBAURA ELECTRIC CO	发明人	MIZOGUCHI TAKAMARO
分类号	H01L21/76;H01L21/31;H01L21/316	主分类号	H01L21/76
代理机构		代理人
主权项
地址

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