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发明名称
VERFAHREN ZUR ERZEUGUNG DEFINIERTER BOESCHUNGSWINKEL BEI EINER AETZKANTE
摘要
申请公布号
DE2554638(A1)
申请公布日期
1977.06.16
申请号
DE19752554638
申请日期
1975.12.04
申请人
SIEMENS AG
发明人
BELL,GUIDO,DR.RER.NAT.;HOEPFNER,JOACHIM,ING.
分类号
H01L21/306;H01L21/02;H01L21/302;H01L21/311;H01L21/3213;H01L21/768;(IPC1-7):H01L21/302
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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