| 摘要 |
PURPOSE:To maintain electric and output characteristics of a gas laser tube in optimum ranges, to reduce in size a gas laser device and to increase its lifetime by sequentially opening and closing a plurality of solenoid valves at a predetermined time interval to supply gas from a high pressure gas cylinder to the tube. CONSTITUTION:A high voltage gas cylinder 2 is connected to a gas laser tube 1 through a plurality of solenoid valves 3a, 3b, 3c, 3d, a gas laser oscillator 5 is composed of the tube 1 and a pair of mirrors 4, 4' at both ends of the tube 1, operated by a power source 6, and controlled. A gas automatic supply circuit 7 detects the gas pressure of the tube 1, and outputs a signal when the pressure becomes a predetermined value or less. The valve 3a of the cylinder side is opened or closed by a delay circuit 8, the valves 3b, 3c, 3d are then sequentially opened or closed to reduce under pressure the gas supplied from the cylinder 2, and the gas is so supplied as to become optimum gas pressure for the gas pressure in the tube 1. Thus, the gas pressure in the tube 1 is so maintained that the electric and output characteristics of the tube become optimum ranges. |
