发明名称 VACUUM VALVES
摘要 The present invention relates to a vacuum valve. By forming an opening/closing operation guide groove including a projected groove region, a first tilted groove region and a second tilted groove region on both sides of an operation block, and forming an L-motion roller movable by being inserted into the opening/closing operation guide groove in an L-motion block, the vacuum valve of the present invention allows one side of a valve blade to block an inlet if the L-motion roller is located in the end unit of the first tilted groove region, and allows the one side of a valve blade to be tightly close to an inner surface of a housing, thereby fundamentally preventing a packing ring provided on a closed surface of the valve blade from being in contact with air and a fluid. Thus, productivity of the packing ring can be enhanced, thereby extending a replacement period of the packing ring.
申请公布号 KR20160062789(A) 申请公布日期 2016.06.03
申请号 KR20140165234 申请日期 2014.11.25
申请人 PRESYS. CO., LTD. 发明人 KIM, BAE JIN;CHOI, KI SUN
分类号 H01L21/02 主分类号 H01L21/02
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