发明名称 Method for cool deposition of layers of materials onto a substrate
摘要 In systems in which material is deposited on a substrate in such a way that substantial heating of the substrate by radiant transmission occurs, such heating is reduced by first depositing a material capable of reflecting a significant fraction of the incident thermal radiation.
申请公布号 US4028206(A) 申请公布日期 1977.06.07
申请号 US19760665857 申请日期 1976.03.10
申请人 KING, WILLIAM JAMES 发明人 KING, WILLIAM JAMES
分类号 B29C65/00;B29C53/00;B29C65/02;B29C71/04;C03C17/09;C08J7/04;C09J5/00;C09J5/06;C23C14/02;C23C14/46;C23C14/50;C23C14/54;G02B1/12;G02C7/10;(IPC1-7):C23C15/00 主分类号 B29C65/00
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