发明名称 |
Method for cool deposition of layers of materials onto a substrate |
摘要 |
In systems in which material is deposited on a substrate in such a way that substantial heating of the substrate by radiant transmission occurs, such heating is reduced by first depositing a material capable of reflecting a significant fraction of the incident thermal radiation.
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申请公布号 |
US4028206(A) |
申请公布日期 |
1977.06.07 |
申请号 |
US19760665857 |
申请日期 |
1976.03.10 |
申请人 |
KING, WILLIAM JAMES |
发明人 |
KING, WILLIAM JAMES |
分类号 |
B29C65/00;B29C53/00;B29C65/02;B29C71/04;C03C17/09;C08J7/04;C09J5/00;C09J5/06;C23C14/02;C23C14/46;C23C14/50;C23C14/54;G02B1/12;G02C7/10;(IPC1-7):C23C15/00 |
主分类号 |
B29C65/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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