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发明名称
MANUFACTURE OF SEMICONDUCTOR UNIT
摘要
申请公布号
JPS5267981(A)
申请公布日期
1977.06.06
申请号
JP19750144256
申请日期
1975.12.03
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
OZAWA SHIGERU
分类号
H01L29/78;H01L21/31;H01L21/324;H01L21/336
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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