| 发明名称 |
APPARATUS FOR WASHING QUARTZ TUBE |
| 摘要 |
PURPOSE:To permit ready washing of the inner and outer walls of quartz tubes by using gas consisting of Freon which is safe as purifying gas with a mere combination of a high frequency power source, high frequency electrode, exhausting means and simple position displacement emchanism. |
| 申请公布号 |
JPS5267166(A) |
申请公布日期 |
1977.06.03 |
| 申请号 |
JP19750143612 |
申请日期 |
1975.12.01 |
| 申请人 |
NIPPON TELEGRAPH & TELEPHONE |
发明人 |
ONO INSEI;HIRAI MINORU;TERAJIMA SATORU;ASAKAWA HIROSHI;HIRATA KAZUO |
| 分类号 |
B08B9/02;B08B7/00 |
主分类号 |
B08B9/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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