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发明名称
SEMICONDUCTOR UNIT
摘要
申请公布号
JPS5267281(A)
申请公布日期
1977.06.03
申请号
JP19750143512
申请日期
1975.12.01
申请人
SUWA SEIKOSHA KK
发明人
TSUDA AKITO
分类号
H01L21/8238;H01L21/28;H01L21/768;H01L27/092;H01L29/43;H01L29/78
主分类号
H01L21/8238
代理机构
代理人
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地址
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