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发明名称
摘要
申请公布号
JPS5220229(B2)
申请公布日期
1977.06.02
申请号
JP19730068071
申请日期
1973.06.15
申请人
发明人
分类号
H01L29/78;H01L21/336;H01L29/40;H01L29/41
主分类号
H01L29/78
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代理人
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