发明名称 |
FORMATION OF THIN FILM |
摘要 |
PURPOSE:To form a uniform coating thickness by immersing a plurality of polygonal substrates into a coating solution then pulling them up so that their one comer leaves the surface of the coating solution. |
申请公布号 |
JPS5266450(A) |
申请公布日期 |
1977.06.01 |
申请号 |
JP19750141649 |
申请日期 |
1975.11.28 |
申请人 |
HITACHI LTD |
发明人 |
ISHITANI SHIZUO;HANADA YOSHIO |
分类号 |
B05D1/18;G02F1/1333;G09F9/30 |
主分类号 |
B05D1/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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