发明名称 POSITIONING DEVICE
摘要 1475671 Piezoelectric positioning systems ELEKTROMAT VEB 2 Dec 1974 [4 Dec 1973] 52117/74 Heading H2A A piezoelectric positioning system comprises a bending element formed by two adhesively bonded piezoceramic plates. In the arrangement shown, a deflection element 2 comprises two adhesively bonded piezoceramic plates 6, a central electrode 9, and two outer electrodes 8, and has its ends supported in two blocks 3 mounted on a rigid base 5 by means of two leaf springs 4, and the electrodes are energized to cause the element to bend, thereby to move a coupling member 7 relative to the base 5. In the system of Fig. 2 (not shown), the deflection element (2) is mounted at one end only and the coupling member (7) is located at the other end. The system of Fig. 1 may be mounted as in Fig. 3A (not shown) with the base (5) fixed to a foundation (12), and with the coupling member (7) joined to a movable locating table (11), or as in Fig. 3B (not shown) wherein the base (5) is connected to a coarse adjusting device (13). The embodiments of Figs. 5A-5D (not shown) each include two deflection elements (2) either for doubling the displacement obtainable with one element (Figs. 5A, 5C), or for doubling the force obtainable with one element (Figs. 5B, 5D).
申请公布号 GB1475671(A) 申请公布日期 1977.06.01
申请号 GB19740052117 申请日期 1974.12.02
申请人 ELEKTROMAT VEB 发明人
分类号 H01L21/687;B23Q1/36;G03F7/20;G03F7/26;H01L41/09;H02N2/04;H04R17/08;(IPC1-7):02N11/00;04R17/00;01H41/00 主分类号 H01L21/687
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