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发明名称
EQUIPMENT FOR PRODUCING BELTTSHAPED CRYSTAL
摘要
申请公布号
JPS5265781(A)
申请公布日期
1977.05.31
申请号
JP19750144590
申请日期
1975.11.28
申请人
KOGYO GIJUTSUIN *JAPAN*
发明人
MATSUI TOSHIROU
分类号
C01B33/02;C30B15/34;C30B29/06;H01L21/208
主分类号
C01B33/02
代理机构
代理人
主权项
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