| 摘要 |
<p>PURPOSE:To obtain a substance which makes junction strength between an AlN substrate and a metallized layer sufficient by permitting its substance to be composed of a powder material in which the specific quantity of a TiN powder is mixed in a tungsten powder and an organic vehicle. CONSTITUTION:In a tungsten powder consisting of a powder material containing a tungsten powder and an organic vehicle, its powder material is composed of 10-99wt.% tungsten powder and 1-90wt.% TiN powder. For example, an AlN green sheet to which 3wt.% Y2O3 is added as a sintering auxiliary is prepared and further, a tungsten paste for metallizing is prepared in such a way that the tungsten powder and the TiN powder are mixed at a ratio within the foregoing limits and the required quantity of the organic vehicle is added to its powder. Subsequently, the tungsten paste is applied to the surface of the AlN green sheet and it is dried to perform removal treatment of a binder. After that, its green sheet is burnt for 5 hours in an atmosphere of N2 at a temperature of 1850 deg.C and then, an AlN substrate having a metallized layer is obtained.</p> |
