VERFAHREN UND ANORDNUNG ZUR VAKUUMUEBERWACHUNG

摘要

Monitoring of gas contamination and of related deviations in pressures within a sealed cavity is effected by way of electrical-network responses to conduction characteristics of a thin-film deposit of getter material within the cavity, the getter film being deposited upon inert insulation between conductive contacts externally connected into an electrical circuit which controls related output signalling in accordance with conductance changes caused by getter material reactions with gas within the cavity.