Structure investigation by optical correlation - using monochromatic light passed through correlator system with two optical lenses, filter and measuring diaphragm

摘要

A method for testing structures uses the principle of optical filtering. Monochromatic light is passed through a micro lens and microdiaphragm and condenser to a partially transparent structure and thence to a photoelectric receiver through a correlator system with two optical lenses and measuring diaphragm. The photoelectric receiver measures by spatial integration. The surface to be measured is twice as great as the smallest detail of the structure to be inspected. The system permits high sensitivity and reproducibility using optical and photoelectric components of moderate quality.