| 摘要 |
1,221,669. Aluminium nitride. MATSUSHITA ELECTRIC INDUSTRIAL CO. Ltd. 22 May, 1968 [24 May, 1967; 25 May, 1967], No. 24493/68. Heading C1A. Aluminium nitride is made by (i) vaporizing an aluminium halide 2, e.g. AlCl 3 and conveying the vapour to a heated reaction zone 4 by means of an inert carrier gas, e.g. N 2 where the halide is converted to the monohalide which is conveyed to a zone of lower temperature, e.g. 800-1100‹ C. where the monohalide disproportionates to form atomic aluminium; (ii) introducing gaseous NH 3 , e.g. from a bubbler 1 into the reaction zone 4 by means of the inert carrier gas where it is thermally decomposed into atomic nitrogen and hydrogen. The atomic N and Al combine in the zone of lower temperature to form AIN. The reaction may be carried out in a quartz tube 3 and the atomic nitrogen is preferably activated by a source of ultra-violet radiation 5. |
