Method of transferring semi-conductor discs by a hinged transfer carrier

摘要

Method and apparatus for transferring semi-conductor discs to and from a slab-form quartz boat which apparatus includes a carrier having a pair of hingedly attached shells having a plurality of opposed slots; the method including the receiving and discharge of discs by and from the slots in the carrier, into and from cooperative slots in the said quartz boat by the pivotal opening and closing of the shells of the carrier.