| 发明名称 |
FORMATION OF SEMICONDUCTOR PELLET |
| 摘要 |
<p>PURPOSE:Deterioration, etc. of circuits and electrodes are prevented by protecting both surfaces of a wafer with a wax layer, fixing the wafer to a supporting plate by way of wax of good machinability then performing scribing and etching of the wafer.</p> |
| 申请公布号 |
JPS5258456(A) |
申请公布日期 |
1977.05.13 |
| 申请号 |
JP19750134052 |
申请日期 |
1975.11.10 |
| 申请人 |
HITACHI LTD |
发明人 |
TAKAHASHI YUKIO;SATOU HIROSHI;OKAMURA SHIMUYA |
| 分类号 |
H01L21/301;H01L21/302;H01L21/306;H01L21/78 |
主分类号 |
H01L21/301 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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