发明名称 |
CONTINUOUS SEMICONDUCTOR CRYSTAL GROWTH APPARATUS |
摘要 |
A crystal growing furnace is provided wherein the molten material in the crucible is replaced constantly as it is withdrawn by a monitoring system which automatically maintains the level in the crucible at a desired point. A replaceable cannister system is also provided so that the level can be maintained indefinitely by replacing the cannisters. |
申请公布号 |
JPS5258080(A) |
申请公布日期 |
1977.05.13 |
申请号 |
JP19760113220 |
申请日期 |
1976.09.22 |
申请人 |
SHIRUTETSUKU CORP |
发明人 |
ROBAATO II RORENJINII;AKIYOSHI IWATA;KAARU RORENZU |
分类号 |
C30B15/02;C30B15/10;C30B15/20;H01L21/208 |
主分类号 |
C30B15/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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