发明名称 CONTINUOUS SEMICONDUCTOR CRYSTAL GROWTH APPARATUS
摘要 A crystal growing furnace is provided wherein the molten material in the crucible is replaced constantly as it is withdrawn by a monitoring system which automatically maintains the level in the crucible at a desired point. A replaceable cannister system is also provided so that the level can be maintained indefinitely by replacing the cannisters.
申请公布号 JPS5258080(A) 申请公布日期 1977.05.13
申请号 JP19760113220 申请日期 1976.09.22
申请人 SHIRUTETSUKU CORP 发明人 ROBAATO II RORENJINII;AKIYOSHI IWATA;KAARU RORENZU
分类号 C30B15/02;C30B15/10;C30B15/20;H01L21/208 主分类号 C30B15/02
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