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发明名称
VERTICAL HEATING FURNACE
摘要
申请公布号
JPS5258459(A)
申请公布日期
1977.05.13
申请号
JP19750134053
申请日期
1975.11.10
申请人
HITACHI LTD
发明人
ISHIOKA MASATO;YAMAGUCHI SHINICHI;NANKOU SUSUMU;MAEJIMA HIROSHI
分类号
H01L21/22;H01L21/20;H01L21/31
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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