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经营范围
发明名称
ION GENERATOR
摘要
申请公布号
JPS5258481(A)
申请公布日期
1977.05.13
申请号
JP19750134077
申请日期
1975.11.10
申请人
HITACHI LTD
发明人
ISHIMARU AKIYUKI
分类号
H01J37/317;H01J3/04;H01J27/00;H01J37/30;H01L21/265;H05H7/08
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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