| 摘要 |
1473374 Molecular pumps LEYBOLDHERAEUS-VERWALTUNG GmbH 31 Oct 1974 [29 Nov 1973] 47269/74 Heading F1C [Also in Division F2] A turbomolecular vacuum pump has its rotor 3 mounted on a stationary vertical pintle 5 via at. least one axial and at least one radial gas bearing. Gas for maintaining the bearings is delivered through ducts 7, 8 and passes through nozzles 14 to 17 of a pair of axially-spaced radial bearings and through nozzles 23 to 26 of an axial bearing. Spent bearing gas is collected in channels 28 to 32 and is delivered therefrom through radial passages (37 to 44), Fig. 2 (not shown), in the pintle to a central collecting duct 9. The rotor is driven by a motor 33, 34. In an alternative embodiment, Figs. 3 and 4 (not shown), the axial bearing is positioned near the lower end of the pintle and most of the gas collecting channels are formed in the pintle instead of in the rotor.
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