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发明名称
PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5255870(A)
申请公布日期
1977.05.07
申请号
JP19750131872
申请日期
1975.11.01
申请人
SHIN NIPPON DENKI KK
发明人
ASAMI HIROSHI
分类号
H01L21/68;G01R31/12;H01L21/302;H01L21/66
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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