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发明名称
VERFAHREN ZUM HERSTELLEN VON HALBLEITERANORDNUNGEN
摘要
申请公布号
DE2646300(A1)
申请公布日期
1977.05.05
申请号
DE19762646300
申请日期
1976.10.14
申请人
INTERNATIONAL BUSINESS MACHINES CORP.
发明人
ANDREW KEENAN,WILLIAM;THOMAS KROLL,CHARLES
分类号
H01L21/265;H01L21/266;H01L21/318;(IPC1-7):H01L21/265;H01L21/425;H01L21/471
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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