CORPSUCULAR BEAM ANALYZING APPARATUS,申请号JP19750129252-传众专利搜索

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发明名称	CORPSUCULAR BEAM ANALYZING APPARATUS
摘要
申请公布号	JPS5254490(A)	申请公布日期	1977.05.02
申请号	JP19750129252	申请日期	1975.10.29
申请人	HITACHI LTD	发明人	FUKUOKA TAKATOSHI;NAGATANI TAKASHI
分类号	G01N23/225;G01N23/223;H01J37/252	主分类号	G01N23/225
代理机构		代理人
主权项
地址

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