| 发明名称 |
PRODUCTIN OF SEMICONDUCTOR DEVICE |
| 摘要 |
PURPOSE:To lower bird head and produce an IC of high scale of integration by coating semiconductor compound solution preferentially to the recess end formed on substrate surface and subjecting the same to partial oxidation.
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| 申请公布号 |
JPS5253679(A) |
申请公布日期 |
1977.04.30 |
| 申请号 |
JP19750129238 |
申请日期 |
1975.10.29 |
| 申请人 |
HITACHI LTD |
发明人 |
KONDOU HIROYUKI;NITSUTA TAKEHISA;MORIGUCHI NOBUO |
| 分类号 |
H01L21/76;H01L21/316;H01L21/32;H01L21/762;H01L29/732 |
主分类号 |
H01L21/76 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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