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发明名称
摘要
申请公布号
JPS5215514(B2)
申请公布日期
1977.04.30
申请号
JP19730058659
申请日期
1973.05.28
申请人
发明人
分类号
H01L29/80;H01L21/306;H01L21/338;H01L29/812
主分类号
H01L29/80
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代理人
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