发明名称 PRODUCTION OF INSB FILM
摘要 PURPOSE:To produce high quality InSb film having flat surface. Formation of crack in an upper coated layer and coagulation of the InSb film can be prevented by the specified layers above and below the InSb film of less than 0.2 mum in thickness followed by melting and recrystallizing the InSb film.
申请公布号 JPS5252363(A) 申请公布日期 1977.04.27
申请号 JP19750127403 申请日期 1975.10.24
申请人 HITACHI LTD 发明人 KODERA NOBUO;MIYAMOTO NOBUO
分类号 C23C14/06;H01L21/20;H01L21/324;H01L29/20;H01L29/786;H01L43/12 主分类号 C23C14/06
代理机构 代理人
主权项
地址