| 发明名称 |
INSPECTOR FOR DEFECTS IN DIRECTIONAL PATTERN |
| 摘要 |
PURPOSE:To improve the image forming property of incoherent light information and the capability of extracting defective information in a pattern by using a gelatin filter which can cut off coherent light but permit incoherent light to be transmitted therethorugh. |
| 申请公布号 |
JPS5250749(A) |
申请公布日期 |
1977.04.23 |
| 申请号 |
JP19750126282 |
申请日期 |
1975.10.22 |
| 申请人 |
TOKYO SHIBAURA ELECTRIC CO |
发明人 |
MINAMI MASAKATA;SEKIZAWA HIDEKAZU |
| 分类号 |
G01B11/00;G01B11/24;G01N21/88;G01N21/94;G01N21/956;G02B27/46 |
主分类号 |
G01B11/00 |
| 代理机构 |
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代理人 |
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| 地址 |
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