发明名称 |
METHOD FOR VACUUM EVAPORATION OF MULTI LAYR FILM |
摘要 |
PURPOSE:Method for vacuum evaporation of optical multi layer film, able to carrying out multi layer film evaporation with high accuracy, able to control the thickness of film with reliability by elevating temperature of plural monitor base plate at the same temperature with heating and making monitor plate exchangable at evaporation process. |
申请公布号 |
JPS5249990(A) |
申请公布日期 |
1977.04.21 |
申请号 |
JP19750124939 |
申请日期 |
1975.10.17 |
申请人 |
TOKYO SHIBAURA ELECTRIC CO |
发明人 |
NAKANO HIROTAKA |
分类号 |
C23C14/06;C23C14/54;G01B11/06 |
主分类号 |
C23C14/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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