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发明名称
ELEKTRONENSTRAHLVERDAMPFER
摘要
申请公布号
DE2544725(A1)
申请公布日期
1977.04.21
申请号
DE19752544725
申请日期
1975.10.07
申请人
LEYBOLD-HERAEUS GMBH & CO KG
发明人
KIENEL,GERHARD,DIPL.-PHYS.DR.;PETERSEIN,HELMUT
分类号
C23C14/30;H01J37/305;(IPC1-7):H05B7/00
主分类号
C23C14/30
代理机构
代理人
主权项
地址
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