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发明名称
PROCESS FOR PRODUCTION OF MIS TYPE SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5247687(A)
申请公布日期
1977.04.15
申请号
JP19750123908
申请日期
1975.10.15
申请人
NIPPON ELECTRIC CO
发明人
ICHIDA KENJI
分类号
H01L21/336;H01L29/78
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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