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发明名称
PHOTOETCHING METHOD
摘要
申请公布号
JPS5244570(A)
申请公布日期
1977.04.07
申请号
JP19750120913
申请日期
1975.10.07
申请人
NIPPON ELECTRIC CO
发明人
TANAKA MASATO;KUBOTA TAKEHIKO
分类号
H05K3/06;H01L21/027;H01L21/302;H05K3/02
主分类号
H05K3/06
代理机构
代理人
主权项
地址
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