| 摘要 |
<PICT:1100447/C6-C7/1> Diamond, boron nitride or Al2O3 are coated with e.g. Mo, W, Ta, or Al by placing the substrate material in a container 19 on a cathode 11 in a chamber containing argon, krypton, helium or nitrogen, and cleaning the substrate by establishing a glow discharge between the anode 17 and cathode 11. After cleaning, a glow discharge is set up between the anode 17 and cathode 20 to deposit material from the cathode 20 on to the substrate, whilst maintaining a glow discharge between the anode 17 and cathode 11. The cathode 11 may be vibrated to vibrate the substrate. A layer of copper may be sputtered on to the metal layer. |
